Optical assembly

An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NGUYEN UY-LIEM, SANVIDO SAVERIO, BIEG HERMANN, XALTER STEFAN, KWAN YIM-BUN PATRICK, SCHMIDT MARTIN, AUBELE KARL-EUGEN
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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