Producing SOI structure using high-purity ion shower
Disclosed are methods for making SOI and SOG structures using purified ion shower for implanting ions to the donor substrate. The purified ion shower provides expedient, efficient, low-cost and effective ion implantation while minimizing damage to the exfoliation film.
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| creator | MASCHMEYER RICHARD ORR CITES JEFFREY SCOTT GADKAREE KISHOR PURUSHOTTAM |
| description | Disclosed are methods for making SOI and SOG structures using purified ion shower for implanting ions to the donor substrate. The purified ion shower provides expedient, efficient, low-cost and effective ion implantation while minimizing damage to the exfoliation film. |
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| title | Producing SOI structure using high-purity ion shower |
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