Core-shell-shell nanowire transistor and fabrication method

A fabrication method is provided for a core-shell-shell (CSS) nanowire transistor (NWT). The method provides a cylindrical CSS nanostructure with a semiconductor core, an insulator shell, and a conductive shell. The CSS nanostructure has a lower hemicylinder overlying a substrate surface. A first in...

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Bibliographische Detailangaben
Hauptverfasser: CROWDER MARK A, TAKAFUJI YUTAKA
Format: Patent
Sprache:eng
Schlagworte:
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