Method of forming semiconductor device including capacitor and semiconductor device including capacitor

Method of forming semiconductor device including capacitor and semiconductor device including capacitor

A method of forming a semiconductor device may include, but is not limited to, the following processes. A second insulating film may be formed over a first insulating film. At least one through-hole may be formed, which penetrates the first and second insulating films. At least one first electrode m...

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1. Verfasser: ETO TOYONORI
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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description A method of forming a semiconductor device may include, but is not limited to, the following processes. A second insulating film may be formed over a first insulating film. At least one through-hole may be formed, which penetrates the first and second insulating films. At least one first electrode may be formed, which extends at least along the side wall of the at least one through-hole. The first inter-layer insulator may be removed, while using the second insulating film as a temporary supporter that supports the at least one first electrode. At least one permanent supporter may be formed, which supports the at least one first electrode. The second insulating film as the temporary supporter may be removed, while leaving the at least one permanent supporter to support the at least one first electrode.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Method of forming semiconductor device including capacitor and semiconductor device including capacitor
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