Cascade source and a method for controlling the cascade source

A cascade source includes a cathode housing, a number of cascade plates insulated from each other and stacked on top of each other which together bound at least one plasma channel, and an anode plate provided with an outflow opening connecting to the plasma channel. One cathode is provided per plasm...

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Bibliographische Detailangaben
Hauptverfasser: CLIJSEN LEONARDUS P. M, PENNINGS REMCO L. J. R, BIJKER MARTIN D, DINGS FRANCISCUS C
Format: Patent
Sprache:eng
Schlagworte:
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