Depository monitoring system in semiconductor storage warehouse

A depository monitoring system for use in a semiconductor factory comprises a plurality of carriers, each holding at least one semiconductor object; a depository monitoring host for monitoring a depository of each carrier; and a plurality of RFID tags and a plurality of RFID readers. It is character...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHI SHIH-TI, FAN SHIENG CHIANG, FAN TZUUNG, YI CHI-MING, HUANG JUIING, CHIANG WEN-HSIANG
Format:	Patent
Sprache:	eng
Schlagworte:	ALARM SYSTEMS ORDER TELEGRAPHS PHYSICS SIGNALLING SIGNALLING OR CALLING SYSTEMS
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