Multilayer silicon over insulator device

An apparatus and method for a multilayer silicon over insulator (SOI) device is provided. In the multilayer SOI device, the crystal orientation of at least one active region of a device is different than the active region of at least another device. Where the multilayer SOI device has a first layer...

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Bibliographische Detailangaben
Hauptverfasser: MOUSA MAHMOUD A, PUTNAM CHRISTOPHER S
Format: Patent
Sprache:eng
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