Active spectral control of DUV light source

According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a...

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Bibliographische Detailangaben

Hauptverfasser:	RAO RAJASEKHAR M, TRINTCHOUK FEDOR B, DUNSTAN WAYNE J, JACQUES ROBERT N
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES USING STIMULATED EMISSION ELECTRICITY
Online-Zugang:	Volltext bestellen
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