Methods and apparatus for providing a semiconductor optical flexured mass accelerometer

Methods and apparatus are provided for integrating various optical components onto a planar substrate using a single semiconductor material system to produce an accelerometer. A light beam is generated on the semiconductor optical accelerometer. The light beam is split to form two light beams using...

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Bibliographische Detailangaben

Hauptverfasser:	TAWNEY JESSE, HAKIMI FARHAD
Format:	Patent
Sprache:	eng
Schlagworte:	GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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