Method of fabricating a semiconductor device

A semiconductor device includes an insulating film formed above an upper surface of a semiconductor substrate and including a contact hole, the contact hole including an upper portion and a lower portion located on the upper portion via a boundary as a first lower end of the upper portion and a firs...

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Bibliographische Detailangaben
1. Verfasser: NISHIMURA TAKAHARU
Format: Patent
Sprache:eng
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