System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method

A system to move a component in accordance with a setpoint profile including a plurality of target states of the component, each of the plurality of target states to be substantially attained at one of a corresponding sequence of target times, is presented. The system includes a displacement device...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN DONKELAAR EDWIN TEUNIS, HEERTJES MARCEL FRANCOIS, TSO YIN-TIM
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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