Ex-situ removal of deposition on an optical element

A collector assembly with a radiation collector, a cover plate and a support member connecting the radiation collector to the cover plate are provided. The cover plate is designed to cover an opening in a collector chamber. The collector chamber opening may be large enough to pass the radiation coll...

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Bibliographische Detailangaben

Hauptverfasser:	IVANOV VLADIMIR VITALEVITCH, BANINE VADIM YEVGENYEVICH, KRIVTSUN VLADIMIR MIHAILOVITCH, SPEE CAROLUS IDA MARIA ANTONIUS, RIDDER JOHANNES BERNARDUS, VOORMA HARM-JAN, SMITS JOSEPHUS JACOBUS, STRUYCKEN ALEXANDER MATTHIJS, TIMMER KLAAS, VAN DEN WILDENBERG LAMBERTUS ADRIANUS
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY PHOTOGRAPHY PHYSICS
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