High accuracy mass flow verifier with multiple inlets

A high accuracy mass flow verifier (HAMFV) which provides high measurement accuracy over a wide flow verification range with low inlet pressures is disclosed for verifying flow measurement by a fluid delivery device. The HAMFV includes a chamber defining a plurality N of inlets with upstream valves,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DING JUNHUA, ZARKAR KAVEH
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TESTING
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