High resolution wafer inspection system

A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GROSSMAN DAN, LANGER MOSHE, REINHORN SILVIU, FELDMAN HAIM, KRIS ROMAN, NAFTALI RON
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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