Piezoelectric inkjet printhead and method of manufacturing the same

A piezoelectric inkjet printhead including an upper substrate formed of a single crystal silicon substrate or an SOI substrate and having an ink inlet therethrough, and a lower substrate formed of an SOI substrate having a sequentially stacked structure with a first silicon layer, an intervening oxi...

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Bibliographische Detailangaben
Hauptverfasser: LEE KYO-YOOL, KANG SUNG-GYU, LEE JAEANG, LEE CHANG-SEUNG, CHUNG JAE-WOO
Format: Patent
Sprache:eng
Schlagworte:
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