Multi-beam deflector array device for maskless particle-beam processing

The invention relates to a multi-beam deflector array device for use in a particle-beam exposure apparatus employing a beam of charged particles, the multi-beam deflector array device having a plate-like shape with a membrane region, the membrane region including a first side facing towards the inco...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SPRINGER REINHARD, BUTSCHKE JOERG, LOESCHNER HANS, KVASNICA SAMUEL, IRMSCHER MATHIAS, PLATZGUMMER ELMAR, LETZKUS FLORIAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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