Techniques for confining electrons in an ion implanter

Techniques for confining electrons in an ion implanter are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for confining electrons in an ion implanter. The apparatus may comprise a first array of magnets and a second array of magnets positioned along...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SMATLAK DONNA L, DORAI RAJESH, ANGEL GORDON C
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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