Gas sensor with nanowires of zinc oxide or indium/zinc mixed oxides and method of detecting NOx gas

A gas sensor is disclosed, which includes two separate metal electrodes on a surface of a substrate and a semiconductor thin film deposited on the surface of the substrate and connecting the two metal electrodes. The semiconductor thin film contains zinc oxide or a mixed oxide of zinc and indium, an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN IRNG, CHUEH MIAO-JU, SU PI-GUEY, SHIH TUNG-SHENG, HUANG YIH-SHIAW
Format: Patent
Sprache:eng
Schlagworte:
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