Remote plasma activated nitridation

A nitrogen precursor that has been activated by exposure to a remotely excited species is used as a reactant to form nitrogen-containing layers. The remotely excited species can be, e.g., N2, Ar, and/or He, which has been excited in a microwave radical generator. Downstream of the microwave radical...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SWERTS JOHAN, HAVERKORT RUBEN, WAN YUET MEI, VAN DER JEUGD CORNELIUS A, DE BLANK MARINUS J, POMAREDE CHRISTOPHE F, BEULENS JACOBUS JOHANNES, DE WITTE HILDE, MAES JAN WILLEM
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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