Semiconductor device with semi-insulating substrate portions and method for forming the same

A method for forming semi-insulating portions in a semiconductor substrate provides depositing a hardmask film over a semiconductor substructure to a thickness sufficient to prevent charged particles from passing through the hardmask. The hardmask is patterned creating openings through which charged...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIN WENIN, LEE CHUAN-YING, TANG DENNY, CHENG HSU CHEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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