Detachable detection window and detecting system

A detachable detection window suitable for being disposed on a sidewall of a plasma chamber is disclosed. The detachable detection window includes a base and a cannular tube. The base herein has a first linking-up part and a second linking-up part is formed at an end of the cannular tube. The base a...

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Bibliographische Detailangaben
1. Verfasser:	LIN NAN-YING
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A detachable detection window suitable for being disposed on a sidewall of a plasma chamber is disclosed. The detachable detection window includes a base and a cannular tube. The base herein has a first linking-up part and a second linking-up part is formed at an end of the cannular tube. The base and the cannular tube are assembled to form the detachable detection window.