Scanning probe microscope displacement detecting mechanism and scanning probe microscope using same

A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it. The displacement de...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAMAMOTO HIROYOSHI, IYOKI MASATO
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!