Apparatus and method for single-sided loading of a furnace or other process station

Solutions permit or facilitate faster and/or easier processing involving loading or unloading of a work module into a process station. For example, the work module may be a processing tube or the like and the process station may be a heating station such as a tube furnace or the like. In one embodim...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TOMBLER, JR. THOMAS W, LAI JON W, LIM BRIAN Y
Format: Patent
Sprache:eng
Schlagworte:
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