Apparatus and method for single-sided loading of a furnace or other process station

Solutions permit or facilitate faster and/or easier processing involving loading or unloading of a work module into a process station. For example, the work module may be a processing tube or the like and the process station may be a heating station such as a tube furnace or the like. In one embodim...

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Bibliographische Detailangaben
Hauptverfasser: TOMBLER, JR. THOMAS W, LAI JON W, LIM BRIAN Y
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Solutions permit or facilitate faster and/or easier processing involving loading or unloading of a work module into a process station. For example, the work module may be a processing tube or the like and the process station may be a heating station such as a tube furnace or the like. In one embodiment, the loading is from a single side of a process station. In one embodiment, the work module includes inlets and outlets for fluid flow, with both inlets and outlets being closer toward one side of the work module than the other side.