System for vertical DMOS with slots

A method for providing a high power, low resistance, high efficient vertical DMOS device is disclosed. The method comprises providing a semiconductor substrate with a source body structure thereon. The method further comprises providing a plurality of slots in the source/body structure and providing...

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Bibliographische Detailangaben
1. Verfasser: HUSHER JOHN DURBIN
Format: Patent
Sprache:eng
Schlagworte:
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