Absolute position measurement apparatus

A first beam having high coherence and a second beam having low coherence are multiplexed onto the same optical axis. This multiplexed beam is split into first and second multiplexed beams. The first multiplexed beam is directed towards a measurement reflection plane of an object to be measured, and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ISHIZUKA KO, KATO SHIGEKI, KADOWAKI HIDEJIRO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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