In situ cleaning process for field effect device spacers
A method is provided for in situ cleaning of spacers (42) separating an anode (14) and cathode (12) of a flat panel display (10) in a vacuum by impacting electrons upon the spacers (42).
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method is provided for in situ cleaning of spacers (42) separating an anode (14) and cathode (12) of a flat panel display (10) in a vacuum by impacting electrons upon the spacers (42). |
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