Electron anti-fogging baffle used as a detector

Methods and apparatus to facilitate the measurement of the amount of scattered electrons collected by an anti-fogging baffle arrangement are provided. For some embodiments, by affixing a lead to an electrically isolated (floating) portion of the baffle arrangement, the amount of scattered electrons...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BULLER BENYAMIN, DEVORE WILLIAM J, FROSIEN JUERGEN, WINKLER DIETER, LOZES RICHARD L, PEARCE-PERCY HENRY
Format: Patent
Sprache:eng
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