Semiconductor device including semiconductor memory element and method for producing same
A wafer, in which a plurality of rectangular regions are defined on the face of the wafer by streets arranged in a lattice pattern, and a semiconductor memory element is disposed in each of the rectangular regions, is divided along the streets to separate the rectangular regions individually, thereb...
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| creator | NANJO MASATOSHI |
| description | A wafer, in which a plurality of rectangular regions are defined on the face of the wafer by streets arranged in a lattice pattern, and a semiconductor memory element is disposed in each of the rectangular regions, is divided along the streets to separate the rectangular regions individually, thereby forming a plurality of semiconductor devices. Before the wafer is divided along the streets, a strained layer having a thickness of 0.20 mum or less, especially 0.05 to 0.20 mum, is formed in the back of the wafer. The strained layer is formed by grinding the back of the semiconductor wafer by a grinding member formed by bonding diamond abrasive grains having a grain size of 4 mum or less by a bonding material. |
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Before the wafer is divided along the streets, a strained layer having a thickness of 0.20 mum or less, especially 0.05 to 0.20 mum, is formed in the back of the wafer. 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Before the wafer is divided along the streets, a strained layer having a thickness of 0.20 mum or less, especially 0.05 to 0.20 mum, is formed in the back of the wafer. The strained layer is formed by grinding the back of the semiconductor wafer by a grinding member formed by bonding diamond abrasive grains having a grain size of 4 mum or less by a bonding material.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Semiconductor device including semiconductor memory element and method for producing same |
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