Method and system for measuring laser induced phenomena changes in a semiconductor device

Method and system for measuring laser induced phenomena changes in a semiconductor device

A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises interconnecting an electrical bridge circuit across the semiconductor device, the semiconductor device being connected as...

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Hauptverfasser: TAN SOON HUAT, NG HOO YIN, KOH LIAN SER, CHUA CHOON MENG, PHANG JACOB CHEE HONG
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator TAN SOON HUAT
NG HOO YIN
KOH LIAN SER
CHUA CHOON MENG
PHANG JACOB CHEE HONG
description A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises interconnecting an electrical bridge circuit across the semiconductor device, the semiconductor device being connected as one of at least four circuit elements of the bridge circuit; inducing the changes in the semiconductor; and monitoring a balance condition of the bridge circuit.
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Method and system for measuring laser induced phenomena changes in a semiconductor device
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