Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate

An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrang...

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Bibliographische Detailangaben

Hauptverfasser:	LEE PAOHUEI, KIYOTAKE TOSHIO, KIM SAM, BAGLEY WILLIAM A, HOFFMAN JAMES, LARSON JONATHAN ERIK, MATSUMOTO TAKAYUKI, KIM KYUNG-TAE, KIM SAM-KYUNG, INAGAWA MAKOTO, LEUNG BILLY C
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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