Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrang...
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| creator | LEE PAOHUEI KIYOTAKE TOSHIO KIM SAM BAGLEY WILLIAM A HOFFMAN JAMES LARSON JONATHAN ERIK MATSUMOTO TAKAYUKI KIM KYUNG-TAE KIM SAM-KYUNG INAGAWA MAKOTO LEUNG BILLY C |
| description | An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect. |
| format | Patent |
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In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20081021&DB=EPODOC&CC=US&NR=7440091B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20081021&DB=EPODOC&CC=US&NR=7440091B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LEE PAOHUEI</creatorcontrib><creatorcontrib>KIYOTAKE TOSHIO</creatorcontrib><creatorcontrib>KIM SAM</creatorcontrib><creatorcontrib>BAGLEY WILLIAM A</creatorcontrib><creatorcontrib>HOFFMAN JAMES</creatorcontrib><creatorcontrib>LARSON JONATHAN ERIK</creatorcontrib><creatorcontrib>MATSUMOTO TAKAYUKI</creatorcontrib><creatorcontrib>KIM KYUNG-TAE</creatorcontrib><creatorcontrib>KIM SAM-KYUNG</creatorcontrib><creatorcontrib>INAGAWA MAKOTO</creatorcontrib><creatorcontrib>LEUNG BILLY C</creatorcontrib><title>Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate</title><description>An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyrEKwjAQANAsDqL-w_2AULUgroriXp0cyjW5hGByKblT6N-7uLg5veXNzaMjllIFfKngJsYcLaY0gSMlq5EDyGsQragEQyV8YiBAdpCjYIqBM7FC8YCQy_vnL83MYxJafV0YuJxvp-uaxtKTjGiJSft7t2_bpjlsjtvdH-UDV6A71Q</recordid><startdate>20081021</startdate><enddate>20081021</enddate><creator>LEE PAOHUEI</creator><creator>KIYOTAKE TOSHIO</creator><creator>KIM SAM</creator><creator>BAGLEY WILLIAM A</creator><creator>HOFFMAN JAMES</creator><creator>LARSON JONATHAN ERIK</creator><creator>MATSUMOTO TAKAYUKI</creator><creator>KIM KYUNG-TAE</creator><creator>KIM SAM-KYUNG</creator><creator>INAGAWA MAKOTO</creator><creator>LEUNG BILLY C</creator><scope>EVB</scope></search><sort><creationdate>20081021</creationdate><title>Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate</title><author>LEE PAOHUEI ; KIYOTAKE TOSHIO ; KIM SAM ; BAGLEY WILLIAM A ; HOFFMAN JAMES ; LARSON JONATHAN ERIK ; MATSUMOTO TAKAYUKI ; KIM KYUNG-TAE ; KIM SAM-KYUNG ; INAGAWA MAKOTO ; LEUNG BILLY C</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US7440091B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2008</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>LEE PAOHUEI</creatorcontrib><creatorcontrib>KIYOTAKE TOSHIO</creatorcontrib><creatorcontrib>KIM SAM</creatorcontrib><creatorcontrib>BAGLEY WILLIAM A</creatorcontrib><creatorcontrib>HOFFMAN JAMES</creatorcontrib><creatorcontrib>LARSON JONATHAN ERIK</creatorcontrib><creatorcontrib>MATSUMOTO TAKAYUKI</creatorcontrib><creatorcontrib>KIM KYUNG-TAE</creatorcontrib><creatorcontrib>KIM SAM-KYUNG</creatorcontrib><creatorcontrib>INAGAWA MAKOTO</creatorcontrib><creatorcontrib>LEUNG BILLY C</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LEE PAOHUEI</au><au>KIYOTAKE TOSHIO</au><au>KIM SAM</au><au>BAGLEY WILLIAM A</au><au>HOFFMAN JAMES</au><au>LARSON JONATHAN ERIK</au><au>MATSUMOTO TAKAYUKI</au><au>KIM KYUNG-TAE</au><au>KIM SAM-KYUNG</au><au>INAGAWA MAKOTO</au><au>LEUNG BILLY C</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate</title><date>2008-10-21</date><risdate>2008</risdate><abstract>An apparatus and method incorporating at least two sensors that detect the presence of substrate defects, such as breakage or misalignment, along the lengths of at least two parallel edges of a moving substrate. In one embodiment, an apparatus for detecting substrate defects includes a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors. In another embodiment, an apparatus for detecting substrate defects includes a robot having a substrate support surface, and a sensor arrangement including at least two sensors that continuously sense a substrate near at least two parallel edges of the substrate during substrate transfer on the substrate support surface. In another embodiment, a method of continuously detecting substrate defects includes positioning at least two sensors to continuously sense a substrate near at least two parallel edges of the substrate as the substrate passes the sensors, and transmitting a signal from each of the at least two sensors to a controller that continuously monitors the signals from the at least two sensors to detect the presence of a substrate defect.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING |
| title | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate |
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