Methods of forming capacitor constructions

The invention includes constructions having two dielectric layers over a conductively-doped semiconductive material. One of the dielectric layers contains aluminum oxide, and the other contains a metal oxide other than aluminum oxide (such metal oxide can be, for example, one or more of hafnium oxid...

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Bibliographische Detailangaben
Hauptverfasser: SRIVIDYA CANCHEEPURAM V, GEALY F. DANIEL, BHAT VISHWANATH
Format: Patent
Sprache:eng
Schlagworte:
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