Method and system for non-destructive distribution profiling of an element in a film

Method and system for non-destructive distribution profiling of an element in a film

A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the ba...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KWAN MICHAEL, REED DAVID, DECECCO PAOLA, BALLANCE DAVE, SCHUELER BRUNO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator KWAN MICHAEL
REED DAVID
DECECCO PAOLA
BALLANCE DAVE
SCHUELER BRUNO
description A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US7411188B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US7411188B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US7411188B23</originalsourceid><addsrcrecordid>eNqNizEOwjAMRbswIOAOvkCHABKdQSAWJspchcahlhI7Slwkbk8GDsD0n_TeXzb9DXUSB5YdlE9RjOAlAwu3DovmeVR6IziqTM9ZSRhSFk-B-AXi6xEwYERWIAYL1cR1s_A2FNz8dtXA5dyfri0mGbAkOyKjDo_7YW-M6brjdvdH8gU6fDiL</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Method and system for non-destructive distribution profiling of an element in a film</title><source>esp@cenet</source><creator>KWAN MICHAEL ; REED DAVID ; DECECCO PAOLA ; BALLANCE DAVE ; SCHUELER BRUNO</creator><creatorcontrib>KWAN MICHAEL ; REED DAVID ; DECECCO PAOLA ; BALLANCE DAVE ; SCHUELER BRUNO</creatorcontrib><description>A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20080812&amp;DB=EPODOC&amp;CC=US&amp;NR=7411188B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20080812&amp;DB=EPODOC&amp;CC=US&amp;NR=7411188B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KWAN MICHAEL</creatorcontrib><creatorcontrib>REED DAVID</creatorcontrib><creatorcontrib>DECECCO PAOLA</creatorcontrib><creatorcontrib>BALLANCE DAVE</creatorcontrib><creatorcontrib>SCHUELER BRUNO</creatorcontrib><title>Method and system for non-destructive distribution profiling of an element in a film</title><description>A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNizEOwjAMRbswIOAOvkCHABKdQSAWJspchcahlhI7Slwkbk8GDsD0n_TeXzb9DXUSB5YdlE9RjOAlAwu3DovmeVR6IziqTM9ZSRhSFk-B-AXi6xEwYERWIAYL1cR1s_A2FNz8dtXA5dyfri0mGbAkOyKjDo_7YW-M6brjdvdH8gU6fDiL</recordid><startdate>20080812</startdate><enddate>20080812</enddate><creator>KWAN MICHAEL</creator><creator>REED DAVID</creator><creator>DECECCO PAOLA</creator><creator>BALLANCE DAVE</creator><creator>SCHUELER BRUNO</creator><scope>EVB</scope></search><sort><creationdate>20080812</creationdate><title>Method and system for non-destructive distribution profiling of an element in a film</title><author>KWAN MICHAEL ; REED DAVID ; DECECCO PAOLA ; BALLANCE DAVE ; SCHUELER BRUNO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US7411188B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2008</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>KWAN MICHAEL</creatorcontrib><creatorcontrib>REED DAVID</creatorcontrib><creatorcontrib>DECECCO PAOLA</creatorcontrib><creatorcontrib>BALLANCE DAVE</creatorcontrib><creatorcontrib>SCHUELER BRUNO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KWAN MICHAEL</au><au>REED DAVID</au><au>DECECCO PAOLA</au><au>BALLANCE DAVE</au><au>SCHUELER BRUNO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method and system for non-destructive distribution profiling of an element in a film</title><date>2008-08-12</date><risdate>2008</risdate><abstract>A method to determine a distribution profile of an element in a film. The method comprises exciting an electron energy of an element deposited in a first film, obtaining a first spectrum associating with the electron energy, and removing a background spectrum from the first spectrum. Removing the background value generates a processed spectrum. The method further includes matching the processed spectrum to a simulated spectrum with a known simulated distribution profile for the element in a film comparable to the first film. A distribution profile is obtained for the element in the first film based on the matching of the processed spectrum to a simulated spectrum selected from the set of simulated spectra.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US7411188B2
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Method and system for non-destructive distribution profiling of an element in a film
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-11T23%3A54%3A03IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KWAN%20MICHAEL&rft.date=2008-08-12&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS7411188B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true