Electrode for electrolysis and method of manufacturing electrode for electrolysis

Electrode for electrolysis and method of manufacturing electrode for electrolysis

An object is to provide an electrode for electrolysis which is preferable in generation of ozone water usable in cleaning and sterilizing of water and sewage, or cleaning in a semiconductor device manufacturing process by an electrolysis process, and a method of manufacturing this electrode for elec...

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Hauptverfasser: IKEMATSU MINEO, TAKAOKA DAIZO, KOIZUMI YURIKA, RAKUMA TSUYOSHI, KANEDA KAZUHIRO
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APPARATUS THEREFOR
CHEMISTRY
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS
METALLURGY
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creator IKEMATSU MINEO
TAKAOKA DAIZO
KOIZUMI YURIKA
RAKUMA TSUYOSHI
KANEDA KAZUHIRO
description An object is to provide an electrode for electrolysis which is preferable in generation of ozone water usable in cleaning and sterilizing of water and sewage, or cleaning in a semiconductor device manufacturing process by an electrolysis process, and a method of manufacturing this electrode for electrolysis. The surface of a conductive substrate constituting the electrode for electrolysis is coated with a noble metal such as platinum or a noble metal oxide to form an intermediate layer, further a surface layer is constituted of a dielectric material on the surface of the intermediate layer, and the surface layer is provided with holes.
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subjects APPARATUS THEREFOR
CHEMISTRY
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTIONOF COMPOUNDS OR NON-METALS
METALLURGY
title Electrode for electrolysis and method of manufacturing electrode for electrolysis
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