Ultralow dielectric constant layer with controlled biaxial stress

Ultralow dielectric constant layer with controlled biaxial stress

A method for forming a ultralow dielectric constant layer with controlled biaxial stress is described incorporating the steps of forming a layer containing Si, C, O and H by one of PECVD and spin-on coating and curing the film in an environment containing very low concentrations of oxygen and water...

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Hauptverfasser: SHAW THOMAS MCCARROLL, NEUMAYER DEBORAH ANN, LINIGER ERIC GERHARD, LANE MICHAEL WAYNE, GRILL ALFRED, NGUYEN SON VAN, LIU XIAO HU, DIMITRAKOPOULOS CHRISTOS DIMITRIOS, GATES STEPHEN MCCONNELL
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:A method for forming a ultralow dielectric constant layer with controlled biaxial stress is described incorporating the steps of forming a layer containing Si, C, O and H by one of PECVD and spin-on coating and curing the film in an environment containing very low concentrations of oxygen and water each less than 10 ppm. A material is also described by using the method with a dielectric constant of not more than 2.8. The invention overcomes the problem of forming films with low biaxial stress less than 46 MPa.