Metrology tool recipe validator using best known methods

A method of preparing recipes for operating a metrology tool, each recipe including a set of instructions for measuring dimensions in a microelectronic feature. A database includes a plurality of known instructions with best known methods for measuring different feature dimensions by creating a summ...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ARCHIE CHARLES N, GOODRICH STEPHEN W, ZHOU LIN, VAKAS GEORGIOS A, AHMED EJAJ, SOLECKY ERIC P, WEISSMANN ERWIN E
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING ELECTRIC VARIABLES MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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