Circuitry and methodology to establish correlation between gate dielectric test site reliability and product gate reliability

A method and system for predicting gate reliability. The method comprises the steps of stressing a gate dielectric test site to obtain gate dielectric test site data and using the test site data to predict gate reliability. Preferably, the test structure and the product structure are integrated in s...

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Bibliographische Detailangaben

Hauptverfasser:	VAN HORN JODY J, NOWAK EDWARD J, BERNSTEIN KERRY, STRONG ALVIN W, WU ERNEST Y, BOLAM RONALD J
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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