Method of producing spacer for an electron beam apparatus

An electron beam apparatus including a hermetic container provided with an electron source, in which, when a first member is arranged in the hermetic container, at least part of the first member is coated with a film, and the film is configured in such a manner that it includes two regions, a first...

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Bibliographische Detailangaben
Hauptverfasser: ITO NOBUHIRO, MITSUTAKE HIDEAKI
Format: Patent
Sprache:eng
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