Optical characteristic analysis method, sample measuring apparatus and spectroscopic ellipsometer

The spectroscopic ellipsometer, by a computer program incorporated therein, applies voltage to a sample placed on a stage, with a power supply device and conducting probe stands, polarizes multi-wavelength light, with a light polarizer, generated by a xenon lamp and irradiates the polarized light to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HONDA YOSHIHISA, NABATOVA-GABAIN NATALIYA, FUNAKUBO HIROSHI, TERAI ASUKA
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING
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