System and method for performing bright field and dark field optical inspection

A system and method are disclosed for performing bright field and dark field optical inspection. In one embodiment, a system is provided for performing bright field coherent detection by means of an interferometer and dark field detection of scattered light using a single apparatus. In other embodim...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HWANG SHIOW-HWEI, CEGLIO NAT
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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