System and method for performing bright field and dark field optical inspection

System and method for performing bright field and dark field optical inspection

A system and method are disclosed for performing bright field and dark field optical inspection. In one embodiment, a system is provided for performing bright field coherent detection by means of an interferometer and dark field detection of scattered light using a single apparatus. In other embodim...

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Hauptverfasser: HWANG SHIOW-HWEI, CEGLIO NAT
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Sprache:eng
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MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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creator HWANG SHIOW-HWEI
CEGLIO NAT
description A system and method are disclosed for performing bright field and dark field optical inspection. In one embodiment, a system is provided for performing bright field coherent detection by means of an interferometer and dark field detection of scattered light using a single apparatus. In other embodiments, the system is operable to perform dark field detection of scattered light as well as phase measuring through phase shifting or spatial fringe analysis techniques. In yet another embodiment, an additional light source is provided for generating an illumination beam directed obliquely at the substrate to permit capture and detection of scattered light in directions near a normal direction to a surface of the substrate, and in directions away from a normal direction to a surface.
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subjects MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
title System and method for performing bright field and dark field optical inspection
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