Single degree of freedom axis positioner

A single degree of freedom positioner resistant to axial and rotational motion on two axes, and to rotation around a third axis, but permitting axial movement along the third axis. The axes are orthogonally related. The positioner is characterized by support of a stage by a plurality of stiffly flex...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: EVERMAN MICHAEL R
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!