Method for determining the reliability of dielectric layers

The present invention is generally directed to various methods for determining the reliability of dielectric layers. In one illustrative embodiment, the method comprises providing a device having a dielectric layer, applying a plurality of constant voltage pulses to the device and measuring a curren...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAYLOR KURT O, BEEBE STEPHEN G, SALMAN AKRAM ALI, ZHAO XUEJUN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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