Process for the separation of chlorosilanes from gas streams
Chlorosilanes are continuously removed from a gas stream in an apparatus in which the gas stream is treated in a first stage with water vapor in the gas phase, and in a second stage with a liquid, aqueous phase.
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| creator | KOOPMANN CHRISTOPH RAULEDER HARTWIG BOLLENRATH FRANZ-MICHAEL SEILER HARALD KUZMA MIECZYSLAW |
| description | Chlorosilanes are continuously removed from a gas stream in an apparatus in which the gas stream is treated in a first stage with water vapor in the gas phase, and in a second stage with a liquid, aqueous phase. |
| format | Patent |
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| subjects | CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING |
| title | Process for the separation of chlorosilanes from gas streams |
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