Polishing apparatus

A polishing apparatus for polishing a surface of a workpiece includes a housing unit, a partition wall partitioning an interior of the housing unit into a first chamber and a second chamber, a polishing section disposed in the first chamber and having a turntable with an abrasive cloth mounted on an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KODAMA SHOICHI, NISHI TOYOMI, TSUJIMURA MANABU, WATASE MASAKO, YAJIMA HIROMI, TOGAWA TETSUJI, SAITO HARUMITSU, MISHIMA SHIRO, IMOTO YUKIO, SHIGETA ATSUSHI, HIMUKAI KAZUAKI, AOKI RIICHIRO, KOUNO GISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING CLEANING CLEANING IN GENERAL DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING HEATING LIGHTING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MECHANICAL ENGINEERING PERFORMING OPERATIONS POLISHING PREVENTION OF FOULING IN GENERAL RANGES SEMICONDUCTOR DEVICES TRANSPORTING VENTILATING WEAPONS
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