Flexible hybrid defect classification for semiconductor manufacturing
Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules in...
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| creator | KOWALSKI MICHAL GAO LISHENG TRIBBLE ARIEL MCCAULEY SHARON ZHANG JIANXIN KULKARNI ASHOK HUET PATRICK BHAGWAT SANDEEP CAMPOCHIARO CECELIA ANNE WU KENONG KINI VIVEKANAND SHANBHAG MARUTI RANDALL DAVID HUANG TONG |
| description | Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data. |
| format | Patent |
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| subjects | CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| title | Flexible hybrid defect classification for semiconductor manufacturing |
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