Mems pilot valve
A valve including a fluid inlet and a fluid outlet coupled by a fluid channel, all of which are defined by walls and structures produced by micromachining of glass and/or silicon. An actuator can be set to at least two different positions in order to vary the flow cross section of the fluid channel....
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| creator | MIDTGAARD OLE-MORTEN ASSKILDT KNUT NYSVEEN ARNE |
| description | A valve including a fluid inlet and a fluid outlet coupled by a fluid channel, all of which are defined by walls and structures produced by micromachining of glass and/or silicon. An actuator can be set to at least two different positions in order to vary the flow cross section of the fluid channel. The geometries of the fluid inlet, outlet and channel are adapted for preventing the flow from changing its direction so sharply that a significant portion of contaminating droplets and or particles in the flow hit the walls of structures, as given in any arrangement according to or between the following two extremes: i) flow outlet is perpendicular to the flow inlet and the outlet dimension is larger than a critical dimension, Lcrit estimated according to a given formula and/or as simulated in a Computational Fluid Dynamics tool, and ii) flow outlet and flow channel is generally parallel to flow inlet giving a substantially unidirectional flow pattern. |
| format | Patent |
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An actuator can be set to at least two different positions in order to vary the flow cross section of the fluid channel. The geometries of the fluid inlet, outlet and channel are adapted for preventing the flow from changing its direction so sharply that a significant portion of contaminating droplets and or particles in the flow hit the walls of structures, as given in any arrangement according to or between the following two extremes: i) flow outlet is perpendicular to the flow inlet and the outlet dimension is larger than a critical dimension, Lcrit estimated according to a given formula and/or as simulated in a Computational Fluid Dynamics tool, and ii) flow outlet and flow channel is generally parallel to flow inlet giving a substantially unidirectional flow pattern.</description><language>eng</language><subject>ACTUATING-FLOATS ; BLASTING ; COCKS ; DEVICES FOR VENTING OR AERATING ; ENGINEERING ELEMENTS AND UNITS ; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; TAPS ; THERMAL INSULATION IN GENERAL ; VALVES ; WEAPONS</subject><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20061024&DB=EPODOC&CC=US&NR=7124773B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20061024&DB=EPODOC&CC=US&NR=7124773B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MIDTGAARD OLE-MORTEN</creatorcontrib><creatorcontrib>ASSKILDT KNUT</creatorcontrib><creatorcontrib>NYSVEEN ARNE</creatorcontrib><title>Mems pilot valve</title><description>A valve including a fluid inlet and a fluid outlet coupled by a fluid channel, all of which are defined by walls and structures produced by micromachining of glass and/or silicon. An actuator can be set to at least two different positions in order to vary the flow cross section of the fluid channel. The geometries of the fluid inlet, outlet and channel are adapted for preventing the flow from changing its direction so sharply that a significant portion of contaminating droplets and or particles in the flow hit the walls of structures, as given in any arrangement according to or between the following two extremes: i) flow outlet is perpendicular to the flow inlet and the outlet dimension is larger than a critical dimension, Lcrit estimated according to a given formula and/or as simulated in a Computational Fluid Dynamics tool, and ii) flow outlet and flow channel is generally parallel to flow inlet giving a substantially unidirectional flow pattern.</description><subject>ACTUATING-FLOATS</subject><subject>BLASTING</subject><subject>COCKS</subject><subject>DEVICES FOR VENTING OR AERATING</subject><subject>ENGINEERING ELEMENTS AND UNITS</subject><subject>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>TAPS</subject><subject>THERMAL INSULATION IN GENERAL</subject><subject>VALVES</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2006</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBDwTc0tVijIzMkvUShLzClL5WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8aHB5oZGJubmxk5GxkQoAQBkHx7f</recordid><startdate>20061024</startdate><enddate>20061024</enddate><creator>MIDTGAARD OLE-MORTEN</creator><creator>ASSKILDT KNUT</creator><creator>NYSVEEN ARNE</creator><scope>EVB</scope></search><sort><creationdate>20061024</creationdate><title>Mems pilot valve</title><author>MIDTGAARD OLE-MORTEN ; ASSKILDT KNUT ; NYSVEEN ARNE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US7124773B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2006</creationdate><topic>ACTUATING-FLOATS</topic><topic>BLASTING</topic><topic>COCKS</topic><topic>DEVICES FOR VENTING OR AERATING</topic><topic>ENGINEERING ELEMENTS AND UNITS</topic><topic>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>TAPS</topic><topic>THERMAL INSULATION IN GENERAL</topic><topic>VALVES</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>MIDTGAARD OLE-MORTEN</creatorcontrib><creatorcontrib>ASSKILDT KNUT</creatorcontrib><creatorcontrib>NYSVEEN ARNE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MIDTGAARD OLE-MORTEN</au><au>ASSKILDT KNUT</au><au>NYSVEEN ARNE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Mems pilot valve</title><date>2006-10-24</date><risdate>2006</risdate><abstract>A valve including a fluid inlet and a fluid outlet coupled by a fluid channel, all of which are defined by walls and structures produced by micromachining of glass and/or silicon. An actuator can be set to at least two different positions in order to vary the flow cross section of the fluid channel. The geometries of the fluid inlet, outlet and channel are adapted for preventing the flow from changing its direction so sharply that a significant portion of contaminating droplets and or particles in the flow hit the walls of structures, as given in any arrangement according to or between the following two extremes: i) flow outlet is perpendicular to the flow inlet and the outlet dimension is larger than a critical dimension, Lcrit estimated according to a given formula and/or as simulated in a Computational Fluid Dynamics tool, and ii) flow outlet and flow channel is generally parallel to flow inlet giving a substantially unidirectional flow pattern.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS |
| title | Mems pilot valve |
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