Capacitive monitors for detecting metal extrusion during electromigration

A method and apparatus for detecting metal extrusion associated with electromigration (EM) under high current density situations within an EM test line by measuring changes in capacitance associated with metal extrusion that occurs in the vicinity of the charge carrying surfaces of one or more capac...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AHSAN ISHTIAQ, KIEWRA EDWARD WILLIAM, IGGULDEN ROY CHARLES, WANG PINGUAN, FILIPPI RONALD GENE
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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