Capacitive monitors for detecting metal extrusion during electromigration

Capacitive monitors for detecting metal extrusion during electromigration

A method and apparatus for detecting metal extrusion associated with electromigration (EM) under high current density situations within an EM test line by measuring changes in capacitance associated with metal extrusion that occurs in the vicinity of the charge carrying surfaces of one or more capac...

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Hauptverfasser: AHSAN ISHTIAQ, KIEWRA EDWARD WILLIAM, IGGULDEN ROY CHARLES, WANG PINGUAN, FILIPPI RONALD GENE
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator AHSAN ISHTIAQ
KIEWRA EDWARD WILLIAM
IGGULDEN ROY CHARLES
WANG PINGUAN
FILIPPI RONALD GENE
description A method and apparatus for detecting metal extrusion associated with electromigration (EM) under high current density situations within an EM test line by measuring changes in capacitance associated with metal extrusion that occurs in the vicinity of the charge carrying surfaces of one or more capacitors situated in locations of close physical proximity to anticipated sites of metal extrusion on an EM test line are provided. The capacitance of each of the one or more capacitors is measured prior to and then during or after operation of the EM test line so as to detect capacitance changes indicating metal extrusion.
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Capacitive monitors for detecting metal extrusion during electromigration
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